| http://www.w3.org/ns/prov#value | - Once contact holes 86 are formed and etch mask is removed, a conductive metal, including for example aluminum (Al), or copper (Cu) or alloy thereof, or tungsten (W), is filled in contact holes 86 which forms an ohmic contact with lower word line 80 through a metal deposition, and a chemical and mechanical polish to remove metal everywhere except in contact vias.
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