About: http://webisa.webdatacommons.org/109204019

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In general, the film formation temperature is maintained by using a heating means such as a heater, but with increasing size of the object substrate, the use of a sheet-wise system becomes dominant.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca