About: http://webisa.webdatacommons.org/109288991

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the exemplary embodiment, the substrate 112 comprises a semiconductor material, such as monocrystalline silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr