About: http://webisa.webdatacommons.org/109384813

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, after formation of the oxide semiconductor films such as the semiconductor layer 103 and the source and drain regions 104 a and 104 b, heating treatment is preferably performed thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com