About: http://webisa.webdatacommons.org/10940706

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Fabrication of the device of FIG. 7 presents a number of difficulties, among them being the ability to reliably form the via 6 without damaging the structure of the field effect transistor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com