About: http://webisa.webdatacommons.org/109480814

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In certain embodiments where the MEMS device is used as an electromechanical capacitive switch, the moving electrode may include a conductor such as Cu, Pt, Ni, Au, Al, or an alloy of the foregoing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com