About: http://webisa.webdatacommons.org/109509952

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One form of sputtering, cathode sputtering, is a process which results in the injection of atoms from the surface of the cathode as a result of the impact of ions against the surface of the cathode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au