About: http://webisa.webdatacommons.org/110127488

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The channels 507 may be made by, for example, molding, RIE, anisotropic wet etching, and other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com