About: http://webisa.webdatacommons.org/110207677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The advantage of the new instrument, compared to techniques such as e-beam lithography that involve removing material by bombarding it with particles, is that the effect is more localized.
http://www.w3.org/ns/prov#wasQuotedFrom	patrickmillard.com