About: http://webisa.webdatacommons.org/110252946

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The carrier may be an optical element, e.g. a lens (1) of an objective (5) for semiconductor lithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com