About: http://webisa.webdatacommons.org/110578301

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	TECHNICAL FIELDThe present invention relates generally to the field of process equipment used in the semiconductor, data storage, flat panel display, as well as allied or other industries.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com