About: http://webisa.webdatacommons.org/110724681

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The capping layer 122 preferably includes materials such as Ta, Ru, or other refractory metals or alloys.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr