About: http://webisa.webdatacommons.org/110739249

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The HEMT of claim 1, wherein the layer including AlN has a thickness of from about 3.0 to about 30.0 ???.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com