| http://www.w3.org/ns/prov#value | - The first electrodes 36 a to 36 d in this embodiment are each a film mainly containing an element selected from the group consisting of Ti, TiN, TiSiXNY, Al, Ag, Ni, W, WSiX, WNX, WSiXNY, Ta, TaNX, TaSiXNY, NbN, Mo, Cr, Pt, Zn, Sn, In, and Mo, or a film mainly containing an alloy or compound material of the above elements, or a laminate of these films.
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