About: http://webisa.webdatacommons.org/110821081

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film 91 a is formed using an organic resin film of polyimide or polyamide, and an insulating film such as a silicon nitride film, a silicon oxide film, or a DLC film is formed thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk