About: http://webisa.webdatacommons.org/110836300

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second dielectric material can be silicon oxide, silicon nitride, or other suitable dielectric materials including a dielectric stack and a combination of various dielectric materials.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com