About: http://webisa.webdatacommons.org/110836638

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon compound gas may be admixed with other compounds, e.g. a carbon compound such as hydrocarbons or carbon fluoride, nitrogen, or a nitrogen compound such as hydrides of nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com