About: http://webisa.webdatacommons.org/110898066

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This may be through multi-dimensional control of the workpiece, chuck, stage, or other system components.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es