About: http://webisa.webdatacommons.org/110910619

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein said layer of palladium or palladium alloy is deposited by means including vacuum sublimation, plasma evaporation, chemical deposition, or anodic deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk