About: http://webisa.webdatacommons.org/110929167

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following is a specific example of the dry etching condition (which is hard to generate the residue).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr