About: http://webisa.webdatacommons.org/110961886

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The device is an example of a microelectromechanical system, or a MEMS, which contains tiny moving parts.
http://www.w3.org/ns/prov#wasQuotedFrom	sciencedaily.com