About: http://webisa.webdatacommons.org/110987025

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as recited in claim 1 wherein the dielectric layer comprises one of hafnium oxide, hafnium silicate, silicon nitride, and other metal oxides that contain at least one cation.15.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com