About: http://webisa.webdatacommons.org/111030547

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates generally to charged particle beam milling and, in particular, to an apparatus and method for reducing differential sputter rates in crystalline and other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com