About: http://webisa.webdatacommons.org/111094097

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A material such as silicon or silicon germanium is used as the material of the amorphous semiconductor film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com