About: http://webisa.webdatacommons.org/111326036

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	BACKGROUND In the processing of substrates, for example, substrate etching processes, substrate deposition processes, and substrate and chamber cleaning processes, gases such as halogen or oxygen gases are used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com