About: http://webisa.webdatacommons.org/111364951

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this manner, the semiconductor layer AS is exposed in the area other than the area in which to form the thin film transistor TFT, and the photoresist film PRES is reduced in film thickness in its entire area.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com