About: http://webisa.webdatacommons.org/111435664

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the device such as a semiconductor integrated circuit or the like, a design rule of the device recently tends to get smaller.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca