About: http://webisa.webdatacommons.org/111435768

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments the variable capacitor MEMS device can be manufactured by any of the conventional micro-machining MEMS fabrication means available using materials such as silicon, polysilicon, and aluminium.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com