About: http://webisa.webdatacommons.org/111450363

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with the invention, an integrated metrology (IM) system, including a method, an apparatus and target structure is described for performing optical measurements of CD, dose and defocus, and overlay.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com