About: http://webisa.webdatacommons.org/111512372

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Any suitable combination of masks and exposures may also be included, such as multiple exposures using a single mask or reticle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com