About: http://webisa.webdatacommons.org/111754476

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As alluded to above, the reticle 400 of the scattering-stencil reticle of FIG. 4A comprises a layer 410 of weakly scattering material such as silicon or silicon nitride having apertures 420 a, 420 b and 420 c therein.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com