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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A source 30 of inert or non-reactive gas, e.g. argon or nitrogen, is likewise connected to the vacuum chamber 23 through a conduit 31.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca