About: http://webisa.webdatacommons.org/111817265

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A second lid section 980 made of a material such as quartz is connected to the top end of an elevator shaft 116b, and the wafer support 118 is supported on a support shaft 116a connected to the second lid section 980.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com