About: http://webisa.webdatacommons.org/111835754

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 18, similar to FIG. 5, is a top-plan view illustrating the layout and the reciprocal alignment of the photolithographic masks used to form the MOS-gated power device structure according to this second embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com