About: http://webisa.webdatacommons.org/112381631

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For the CVD for growing the insulating layer 62 to a thickness such as 50 nm, silane gas and oxygen gas are used at a temperature of 400??? C., for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com