About: http://webisa.webdatacommons.org/112396227

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem that Al is disconnected along the end of the resist due to the phenomenon attributable to electrostatic breakdown of the resist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au