About: http://webisa.webdatacommons.org/112742610

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wafer 11 comprises a underlying layer such as a polysilicon layer or a metal layer, and a resist coated thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au