About: http://webisa.webdatacommons.org/11277207

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	it is impossible to deposit on the surface of a substrate by merely effecting a reaction of a carbon-containing gas at such low temperature as intended in the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr