About: http://webisa.webdatacommons.org/112852002

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sidewall spacers 170 can be formed from any of the materials such as silicon nitride, silicon dioxide, silicon oxynitride, boron nitride or a combination of materials to form a sandwiched spacer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com