About: http://webisa.webdatacommons.org/11292988

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9A is a plan view of the moving components and the capacitive circuit in another embodiment of the invention as fabricated from the SOI in FIG. 6, with the scale in microns.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com