About: http://webisa.webdatacommons.org/113118004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the substrate is a metal (such as aluminum or an aluminum alloy), the plasma source gas typically includes Cl2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es