About: http://webisa.webdatacommons.org/113262105

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective film 613 is formed using an insulating film such as silicon oxide, silicon nitride, or silicon nitride oxide by an ink-jet method, a plasma CVD method, a sputtering method or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com