About: http://webisa.webdatacommons.org/113301263

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The buffer insulation film 111 comprises an SiNx film 109 with a thickness of, e.g. 50 nm and an SiO2 film 110 with a thickness of, e.g. 100 nm, which are formed on the no-alkali glass substrate 101.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com