About: http://webisa.webdatacommons.org/113666777

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The remaining Al and Mo stacked films not removed by etching causes short-circuit particularly in a portion densely patterned, for example, between the gate wiring lines arranged in a short distance.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com