About: http://webisa.webdatacommons.org/113666913

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 wherein the moving is provided by rotating the substrate including the surface topography about a center region, while the air bearing region moves along the surface topography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com