About: http://webisa.webdatacommons.org/113682478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ions emitted from the arc-forming section 15 are preferentially ionized in order to direct silicon and other materials to be deposited at the target 53 (FIG. 1) in a step represented by block 81.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au