About: http://webisa.webdatacommons.org/113708604

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ferroelectric materials of the present invention are deposited preferably by metallorganic chemical vapor deposition techniques (MOCVD), although other methods such as PECVD or MOD could be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com