About: http://webisa.webdatacommons.org/113720433

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma vessel can include sapphire, quartz, Y2O3, SiC, Si3N4, AlN, BN, ZrO2, alumina or other ceramic materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com