About: http://webisa.webdatacommons.org/113833966

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, the fabrication method can use a method of forming other than the CVD method, e.g. a sputtering method and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com