| http://www.w3.org/ns/prov#value | - own in FIG. 12, there is a case that the doped semiconductor layer 15 formed on the first region (left side of FIG. 12) of the beam 13 and the doped semiconductor layer formed on the second region (right side of FIG. 12) of the beam 13 are not symmetric with respect to the center line M1.
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